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Beamfluxmonitor BFM Linearverdampfer beam shaping wafer holder Multi-Pocket-Evaporator EBVM valved source low temperature cell OREZ DECO-D VSS wire heater Soft-acting Rotary Shutter Module RSM atomic hydrogen source plasma source rapid thermal annealing Cables and Connectors CA SUSI thermal evaporator VSCS MBE buffer chamber Production Effusion Cell PEZ Industrial Sources vacuum deposition oxygen resistant effusion cell OEZ OBS dopant cell ozone Silicon Sublimation Source SUSI

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