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e-beam evaporator RTP Production Effusion Cell PEZ Hydrogen Atom Beam Source HABS small sample thermal evaporator VSCS Refractory Metal Parts RMP oxygen resistant effusion cell OEZ SH WEZ Silicon Sublimation Source SUSI Rotary Pneumatic Module RPM Verdampferquelle Dotierquelle Multiprobe Systems in-situ characterization tool PVD cooling shroud VACS Cryopump Valve Control Unit CVCU EBVM LEZ source clusters molecular beam epitaxy system High Temperature Effusion Cell HTEZ Shutter S SiC heater effusion source

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