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valved thermal deposition source HGS Cryopump Valve Control Unit CVCU Legierofen Organic Material Effusion Cell OME in-situ characterization tool DCS Shutter S SiC heater thin film deposition LEZ Dotierzelle organic evaporation system pneumatic shutter VCS Power Supply and Temperature Control PS Ga-trapping-cap system Sample Heater Thin Film Sources organic evaporator HV RMP Effusionszelle OLED deposition system GaP Decomposition Source DECO HABS surface analyzer solar cell manifacturing valved sources RPM

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