Glossary
Evaporator in which a source material target (anode) is bombarded with an electron beam. The electron beam es provided by a charged tungsten filament under high vacuum. Mainly two different types of e-beam evaporators are used. For very low beam flux applications a thin stick or wire is heated at its tip to sublimate material. The other type uses magnetically bended e-beams from an e-beam gun to melt material in a water cooled crucible resulting in high beam fluxes.
