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OLED MBE in Organic Deposition System - Dr. Eberl MBE-Komponenten GmbH
Organic Deposition System - MBE Systems

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Cables and Connectors CA Ga-trapping-cap system buffer chamber Thin Film Systems organic deposition system Linear Sources LEZ enrichment High Temperature Source HTS Valved Arsenic Cracker Source VACS effusion cell rapid thermal processing RTP EBVV II-VI MBE organic material evaporator beam shaping RMP surface analyzer Organic Material Effusion Cell OME Vakuumsublimation vccs soft acting shutter Silicon Sublimation Dopant Source SUSI-D HABS HGS atomic hydrogen source customized evaporators Shutter Control Unit SCU SUSI Beamfluxmonitor BFM Karl Eberl

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