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Glossary
Glossary
The original Knudsen type evaporation source is an evaporation cell with small orifice. It has been described by Martin Knudsen in 1909 and was used to measure vapor pressure data. Many people use the name Knudsen cell or k-cell for large opening effusion cells despite the fact, that the orifice is open or conical shaped.
Effusion Cells are used as evaporator in MBE for materials like Ga, In, Al, As etc.. It is a thermal evaporator with a crucible. The flux of the source is controlled by careful temperature regulation.
A typical effusion cell contains a crucible (made of pyrolytic boron nitride, quartz, tungsten or graphite), heating filaments (often made of metal tantalum), water cooling system, heat shields and orifice shutter.