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Verdampferquelle in Thin Film / CIGS Sources - Dr. Eberl MBE-Komponenten GmbH
Thin Film / CIGS Sources

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Knudsen cell hydrogen source metal evaporation Wafer Heater WH manipulator pneumatic shutter Silicon Sublimation Source SUSI Cables and Connectors CA buffer chamber PVD thermal evaporator Valved Sulfur Cracking Source VCS Linear Sources LEZ enrichment OEZ Verdampferquelle Customized UHV Systems HABS III-V MBE OLED Evaporation Source HTEZ Shutter Control Unit SCU organic evaporator sulfur thermal deposition source atomic hydrogen valved sources RMP surface analyzer Vertical Electron Beam Evaporator EBVV vccs

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