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Verdampferquelle in Thin Film / CIGS Sources - Dr. Eberl MBE-Komponenten GmbH
Thin Film / CIGS Sources

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SH-O Valved Arsenic Cracker Source VACS Thermostar e-beam evaporator rapid thermal processing RTP valved cracker EBVV RPM Ga-trapping-cap system Linearverdampfer Thin Film Systems Cooling Shrouds CS LN2 cooling shroud High Temperature Source HTS VSS soft acting shutter plasma source Silicon Sublimation Dopant Source SUSI-D Dotierzelle rapid thermal annealing HGS Soft-acting Rotary Shutter Module RSM WEZ MCU OLED MBE SiGe MBE Organic Material Effusion Cell OME Point Sources PEZ-G sulfurization ozone injection

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