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Keyword: OLED deposition system

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OLED deposition system in Publications - Dr. Eberl MBE-Komponenten GmbH
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GaP Decomposition Source DECO Manipulator Control Unit MCU SUSI valved thermal deposition source High Voltage Power Supply HV SiGe MBE beam flux monitor TGI enrichment Effusionszelle linear vapor source SUKO-D PEZ-G PVD Customized UHV Systems Shutter Control Unit SCU GaP decomposition substrate manipulation HGS CRU customized evaporators Oxygen Resistant Effusion cell OREZ MBE Elektronenstrahlverdampfer DCS CS Organikverdampfer shutter module Gas Sources small sample