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II-VI MBE thermal evaporation Multi-Pocket-Evaporator EBVM simulation valved cracker service High Temperature Effusion Cell HTEZ Power Supply and Temperature Control PS DECO-D RMP organic deposition system wire heater HABS transfer rod Molekularstrahlepitaxie Ga-trapping-cap system VSCS WH metal evaporation PEZ Rotary Pneumatic Module RPM cracking cell pneumatic shutter Verdampfer in-situ OEZ valved source cluster source Carbon Sublimation Source SUKO CVCU