(sometimes also called degassing)

Initial thermal outgassing of UHV components like effusion cells or heated stages is required to remove tightly bound species and the hydrogen diffusing from the bulk.

During the outgassing procedure, the local heaters are operated well above subsequent operation temperatures.

This means, for example, that the crucible heater of an effusion cell is heated to maximum temperatures as high as 1400 to 1500°C prior to crucible loading with source material.


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