Glossary
Glossary
Planar epitaxial layer growth in straind layer epitaxie. In the pseudo-morphic growth regime the epitaxial layer latterally strained (extended or compressed) in order to matched the lattice of the crystalline substrate. E.g.: GaInAs on GaAs substrate. Above a critical film thickness misfit dislocations are introduced which allow strain relaxation.
 
 
 
 

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