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Organic Material Effusion Cell OEZ Hydrogen Atom Beam Source HABS small sample OLED Evaporation Source DECO Refractory Metal Parts RMP rapid thermal processing RTP Elektronenstrahlverdampfer Thin Film Systems Rotary Pneumatic Module RPM Dotierzelle organic evaporation system substrate manipulation Valved Arsenic Cracker Source VACS SH thin film deposition in-situ characterization tool low temperature cell OREZ Cryopump Valve Control Unit CVCU wafer holder Multi-Pocket-Evaporator EBVM wire heater Shutter S SiC heater Effusionszelle DECO-D LEZ organic evaporator Production Effusion Cell PEZ

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