Glossary
Glossary
Misfit dislocations are basically where there is a missing or dangling bond in the lattice between two layers with different lattice constant. In Si/SiGe heterostructures, when SiGe is grown on Si above the critical thickness 60˚ misfit dislocations result due to the smaller silicon lattice as compared to SiGe.
 
 
 
 

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