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RPM innovative solutions VGCS evaporation cell SH-O Oxygen Resistant Substrate Manipulator SH-O CVCU Dotierzelle components organic evaporation system EBVV mbe systems pumping system thin film deposition High Temperature Source HTS S turbo pump Carbon Doping Source SUKO-D Se- and S-Valved Sources VSS Octoplus 400 PS Effusionszelle uhv system Valved Mercury Evaporation Source HGS simulation organic evaporator NTEZ Dual Dopant Source DCS Crucibles CRU Oxygen Atom Beam Source OBS

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