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Vertical Electron Beam Evaporator EBVV organic molecular beam epitaxy Point Sources PEZ-G HTEZ Karl Eberl In-situ Etching System ISES ozone injection in-situ Shutter Control Unit SCU competence vccs RTA system SUSI-D II-VI MBE valved cracker Cooling Shrouds CS hydrogen source Low Temperature Effusion Cell NTEZ Thermostar LN2 cooling shroud AKS Linearverdampfer beam shaping oxide deposition sample transfer OME-100 R&D Systems organic material effusion cell Doping Effusion Cell EZ atomic hydrogen source

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