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Keyword: enrichment

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organic MBE mask Thermostar small footprint evaporation source graphenes Dual Dopant Source DCS Cooling Shrouds CS atomic hydrogen source RTA system Valved Sulfur Cracking Source VCS R&D Sources rapid thermal annealing Low Temperature Effusion Cell NTEZ RSM heterostructures organic material evaporator deposition High Voltage Power Supply HV SiGe MBE heated stage cooling shroud GaP Decomposition Source DECO Manipulator Control Unit MCU PEZ-G UHV deposition Oxygen Resistant Substrate Manipulator SH-O TGI competence enrichment