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Oxygen Atom Beam Source OBS transfer rod evaporation cell Oxygen Resistant Substrate Manipulator SH-O cracking cell Crucibles CRU VGCS WH EBVV Dr. Eberl Viewport Shutter FSH mbe systems High Temperature Source HTS SUKO organic molecular beam epitaxy valved source Octoplus 400 Karl Eberl Beamfluxmonitor BFM Carbon Doping Source SUKO-D uhv system Valved Mercury Evaporation Source HGS Soft-acting Rotary Shutter Module RSM plasma source NTEZ II-VI MBE valved cracker VSS beam shaping buffer chamber

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