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wafer holder Multi-Pocket-Evaporator EBVM in-situ characterization tool cracking cell low temperature cell OREZ Cryopump Valve Control Unit CVCU DECO-D LEZ Dr. Eberl wire heater Shutter S SiC heater SUKO thermal evaporator VSCS Thin Film Sources Karl Eberl Production Effusion Cell PEZ Power Supply and Temperature Control PS organic molecular beam epitaxy RMP oxygen resistant effusion cell OEZ HABS surface analyzer II-VI MBE valved cracker Silicon Sublimation Source SUSI VACS

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