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Keyword: Vakuumsublimation

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linear vapor source PEZ Oxygen Atom Beam Source OBS effusion cell DCS SCU II-VI MBE valved thermal deposition source Cs/Rb-Valved Alkali Metal Source AKS Crucibles CRU transfer rod organic deposition system mask OEZ Cluster OME-100 DECO Rotary Pneumatic Module RPM atomic hydrogen source thermal evaporation customized evaporators VGCS BFM in-situ monitoring organic material evaporator sample transfer beam shaping Organic Material Effusion Cell OEZ SH Vakuumsublimation Oxygen Resistant Substrate Manipulator SH-O

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