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News / 2020

Oxide MBE System OCTOPLUS-O 400 with CO2 laser substrate heating

Our versatile Oxide MBE system OCTOPLUS-O 400 is ideally suited for epitaxial oxide layer deposition. It is available with an ozone-resistant SiC substrate heater or alternatively with CO2 laser substrate heating.
Substrate heating in oxygen environment by means of a CO2 laser turns out to be very effective. Various oxide substrates absorb CO2 laser light strongly and allow subtrate heating up to more than 1400°C. An additional backside metal coating is not necessary.
Please see reference.
Oxide MBE System OCTOPLUS-O 400 with CO2 laser substrate heating
 
 
 
 

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