News / 2020
Oxide MBE System OCTOPLUS-O 400 with CO2 laser substrate heating
Our versatile Oxide MBE system OCTOPLUS-O 400 is ideally suited for epitaxial oxide layer deposition. It is available with an ozone-resistant SiC substrate heater or alternatively with CO2 laser substrate heating.
Substrate heating in oxygen environment by means of a CO2 laser turns out to be very effective. Various oxide substrates absorb CO2 laser light strongly and allow subtrate heating up to more than 1400°C. An additional backside metal coating is not necessary.
Please see reference.
Substrate heating in oxygen environment by means of a CO2 laser turns out to be very effective. Various oxide substrates absorb CO2 laser light strongly and allow subtrate heating up to more than 1400°C. An additional backside metal coating is not necessary.
Please see reference.
