News / 2014
28th EU PVSEC (2013) Conference Proceedings
In this work we demonstrate the feasibility of fast ramping rates for copper evaporation from a standard PEZ-W 63-160 effusion cell.
With a precise dynamic ramping, the rate profiles of inline deposition systems can be reproduced.
Process development and transfer from MBE-like co-evaporation systems to inline production systems become much easier.
