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metal evaporation PEZ High Temperature Effusion Cell HTEZ Power Supply and Temperature Control PS cracking cell pneumatic shutter Multi-Pocket-Evaporator EBVM simulation in-situ HABS transfer rod cluster source DECO-D RMP Verdampfer Vakuumsublimation Substrate Manipulator SH Rotary Pneumatic Module RPM Karl Eberl mbe systems VSCS WH OEZ valved source tilted sources Carbon Sublimation Source SUKO CVCU components shutter thermal evaporator