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references effusion source Octoplus 400 RSM controller Organikverdampfer atomic hydrogen Carbon Doping Source SUKO-D uhv system Valved Mercury Evaporation Source HGS control system electron beam evaporator high temperature cell NTEZ CA Vakuumsublimation Point Sources PEZ-G In-situ Etching System ISES ozone injection Dual Dopant Source DCS Valved Sulfur Cracking Source VCS vccs Dotierzelle organic evaporation system Wafer Heater WH Shutter Control Unit SCU competence thin film deposition deposition High Voltage Power Supply HV
  • Home
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    • Nano- and Opto-Electronics
    • Thin Film Solar Cells
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      • Simulation
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