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Rapid Thermal Annealing System

Rapid Thermal Annealing System

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Linear Sources LEZ enrichment DCS valved thermal deposition source effusion cell Cs/Rb-Valved Alkali Metal Source AKS mask II-VI MBE Cables and Connectors CA buffer chamber linear vapor source PEZ organic deposition system DECO Vakuumsublimation vccs thermal evaporation VGCS HABS sample transfer atomic hydrogen source Organic Material Effusion Cell OEZ customized evaporators Shutter Control Unit SCU Oxygen Resistant Substrate Manipulator SH-O organic material evaporator beam shaping RMP surface analyzer High Temperature Effusion Cell HTEZ

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