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Rapid Thermal Annealing System

Rapid Thermal Annealing System

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Knudsen cell metal evaporation OEZ Cluster mask manipulator Oxygen Atom Beam Source OBS linear vapor source PEZ PVD SCU DCS Crucibles CRU valved thermal deposition source transfer rod Cs/Rb-Valved Alkali Metal Source AKS SH sample transfer Organic Material Effusion Cell OEZ III-V MBE OME-100 Oxygen Resistant Substrate Manipulator SH-O organic evaporator atomic hydrogen Rotary Pneumatic Module RPM DECO BFM thermal evaporation in-situ monitoring VGCS Verdampferquelle

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