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Rapid Thermal Annealing System

Rapid Thermal Annealing System

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Refractory Metal Parts RMP VGCS PVD cooling shroud Hydrogen Atom Beam Source HABS small sample evaporation cell Oxygen Resistant Substrate Manipulator SH-O Dotierquelle source clusters SH EBVV Rotary Pneumatic Module RPM mbe systems High Temperature Source HTS Carbon Doping Source SUKO-D Organikverdampfer atomic hydrogen in-situ characterization tool Octoplus 400 effusion source Cryopump Valve Control Unit CVCU high temperature cell LEZ uhv system Valved Mercury Evaporation Source HGS Vakuumsublimation Shutter S SiC heater NTEZ

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