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references source clusters Shutter S plasma source manipulator thermal gas cracker VACS Se- and S-Valved Sources VSS EBVM buffer chamber effusion cell hydrogen source HTEZ PS organic molecular beam epitaxy Octoplus 400 RTP NTEZ Oxygen Atom Beam Source OBS ozone e-beam evaporator soft acting shutter Silicon Sublimation Dopant Source SUSI-D Crucibles CRU molecular beam epitaxy customized MBE systems RPM Linearverdampfer rapid thermal processing RTP Cs/Rb-Valved Alkali Metal Source AKS