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evaporation cell Oxygen Resistant Substrate Manipulator SH-O FSH organic deposition system VGCS valved corrosive material cracker source vccs k-cell GaP decomposition customized evaporators mbe systems High Temperature Source HTS BFM EBVV in-situ monitoring RSM controller Verdampfer thin film deposition simulation Carbon Doping Source SUKO-D references Molekularstrahlepitaxie point source Octoplus 400 cracker source NTEZ CA OLED MBE customized MBE systems uhv system Valved Mercury Evaporation Source HGS

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