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OCTOPLUS 500 EBV

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manipulator Valved Arsenic Cracker Source VACS PVD Cables and Connectors CA buffer chamber rapid thermal processing RTP EBVV Linear Sources LEZ Ga-trapping-cap system enrichment Thin Film Systems Knudsen cell metal evaporation High Temperature Source HTS soft acting shutter Silicon Sublimation Dopant Source SUSI-D organic evaporator atomic hydrogen Shutter Control Unit SCU HGS RMP surface analyzer Verdampferquelle vccs Organic Material Effusion Cell OME III-V MBE HABS Doping Effusion Cell EZ Verdampfer beam flux monitor

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