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Soft-acting Rotary Shutter Module RSM oxide deposition linear evaporator oxygen resistant effusion cell VGCS R&D Systems Dr. Eberl Eberl gas source Dotierzelle OLED Evaporation Source HTS CA point source Sample Heater EBVV Thermal Gas Injector TGI ozone source SUSI valved thermal deposition source Carbon Doping Source SUKO-D Point Sources PEZ-G beam flux monitor FSH PVD Customized UHV Systems Valved Mercury Evaporation Source HGS OEZ Cluster Effusionszelle linear vapor source