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Doping Effusion Cell EZ Beamfluxmonitor BFM Verdampferquelle evaporation cell Industrial Point Sources in-situ monitoring organic evaporator sample transfer organic evaporation system Production Effusion Cell PEZ Valved GaP Compound Source VGCS VSS cracker source organic material effusion cell S controller High Temperature Source HTS Cables and Connectors CA atomic hydrogen Vertical Electron Beam Evaporator EBVV control system OME wafer holder OLED MBE Multiprobe Systems SUSI-D Industrial Sources Knudsen cell molecular beam epitaxy system OBS