Spintronics, MBE Components
MBE COMPONENTS
SUKOCarbon Sublimation Sources
SUKO
Silicon Sublimation Source SUSISilicon Sublimation Source
SUSI
DECOGaP Decomposition Sources
DECO
Thermal Cracker Cell TCCThermal Cracker Cell
TCC
Vertical Electron Beam Evaporator EBVVVertical Electron Beam Evaporator
EBVV
 
 
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rapid thermal processing RTP Thermostar EBVV e-beam evaporator Ga-trapping-cap system valved cracker Thin Film Systems RPM Linearverdampfer High Temperature Source HTS Cooling Shrouds CS LN2 cooling shroud Valved Arsenic Cracker Source VACS SH-O HGS Dotierzelle rapid thermal annealing Soft-acting Rotary Shutter Module RSM WEZ Organic Material Effusion Cell OME MCU SiGe MBE OLED MBE soft acting shutter Silicon Sublimation Dopant Source SUSI-D VSS plasma source Effusionszelle In-situ Etching System ISES components
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