Metals, MBE Components
MBE COMPONENTS
SUKOCarbon Sublimation Sources
SUKO
Silicon Sublimation Source SUSISilicon Sublimation Source
SUSI
DECOGaP Decomposition Sources
DECO
Thermal Cracker Cell TCCThermal Cracker Cell
TCC
Vertical Electron Beam Evaporator EBVVVertical Electron Beam Evaporator
EBVV
 
 
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beam flux monitor Oxygen Atom Beam Source OBS ozone SUSI valved thermal deposition source Silicon Sublimation Dopant Source SUSI-D Crucibles CRU Effusionszelle linear vapor source RPM PVD Customized UHV Systems Cs/Rb-Valved Alkali Metal Source AKS valved corrosive material cracker source vccs customized evaporators Oxygen Resistant Effusion cell OREZ Industrial Point Sources in-situ monitoring GaP decomposition substrate manipulation Doping Effusion Cell EZ Beamfluxmonitor BFM innovative solutions MBE Elektronenstrahlverdampfer S controller Organikverdampfer shutter module Valved GaP Compound Source VGCS