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CIGS source metal evaporation Thin Film Sources VGCS Power Supply and Temperature Control PS evaporation cell Oxygen Resistant Substrate Manipulator SH-O mbe systems High Temperature Source HTS HABS surface analyzer EBVV heated stage RMP k-cell SH-O Carbon Doping Source SUKO-D organic deposition system RPM innovative solutions Octoplus 400 GaP decomposition customized evaporators pumping system uhv system Valved Mercury Evaporation Source HGS CVCU components NTEZ Molekularstrahlepitaxie
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