Nano- and Opto-Electronics,Simulation
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Carbon Doping Source SUKO-D Point Sources PEZ-G beam flux monitor Thermal Gas Injector TGI ozone source SUSI valved thermal deposition source Customized UHV Systems Valved Mercury Evaporation Source HGS OEZ Cluster Effusionszelle linear vapor source components FSH PVD Dual Dopant Source DCS Cooling Shrouds CS customized evaporators Oxygen Resistant Effusion cell OREZ Thermostar small footprint GaP decomposition substrate manipulation Valved Sulfur Cracking Source VCS R&D Sources MBE Elektronenstrahlverdampfer RSM heterostructures Organikverdampfer