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sulfurization Wafer Heater WH Multi-Pocket-Evaporator EBVM simulation Dotierquelle OLED deposition system High Temperature Effusion Cell HTEZ Power Supply and Temperature Control PS references thin film deposition simulation HABS transfer rod SUKO uhv system DECO-D RMP vacuum deposition Octoplus 500 VSCS WH effusion source Legierofen Rotary Pneumatic Module RPM high temperature cell Organic Material Effusion Cell OME OEZ valved source electron beam evaporator solar cell manifacturing Carbon Sublimation Source SUKO