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Karl Eberl Multi-Pocket-Evaporator EBVM mbe systems simulation High Temperature Effusion Cell HTEZ Vakuumsublimation Power Supply and Temperature Control PS Substrate Manipulator SH tilted sources RMP shutter HABS thermal evaporator transfer rod DECO-D evaporation source VSCS graphenes WH organic MBE Rotary Pneumatic Module RPM mask components atomic hydrogen source OEZ RTA system valved source Carbon Sublimation Source SUKO rapid thermal annealing CVCU