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Rapid Thermal Annealing System

Rapid Thermal Annealing System

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ozone injection Karl Eberl Octoplus 400 Point Sources PEZ-G organic molecular beam epitaxy Carbon Doping Source SUKO-D In-situ Etching System ISES Shutter Control Unit SCU competence II-VI MBE valved cracker NTEZ vccs uhv system Valved Mercury Evaporation Source HGS Cooling Shrouds CS Linearverdampfer beam shaping Dual Dopant Source DCS Thermostar LN2 cooling shroud Soft-acting Linear Shutter Module LSM oxide deposition atomic hydrogen source rapid thermal annealing Wafer Heater WH R&D Systems Valved Sulfur Cracking Source VCS deposition High Voltage Power Supply HV

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