Nano Structures, MBE Components
MBE COMPONENTS
Substrate ManipulationSubstrate Manipulation
Effusion CellsStandard Effusion Cells
WEZ
Source ClustersSource Clusters
High Temperature Effusion Cell HTEZHigh Temperature Source
HTEZ
Vertical Electron Beam Evaporator EBVVMini E-Beam Evaporators
EBVV
Carbon Sublimation Source SUKOCarbon Sublimation Source
SUKO
 
 
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In-situ Etching System ISES SiC heater metal evaporation PEZ valved sources Linear Sources LEZ cracking cell pneumatic shutter SCU cluster source Standard Electron Beam Evaporator EBV Thin Film Sources Verdampfer in-situ Substrate Manipulator SH Phosphorus Doping Source DECO-D Refractory Metal Parts RMP Karl Eberl mbe systems Hydrogen Atom Beam Source HABS surface analyzer Vakuumsublimation LSM tilted sources Valved Selenium Cracking Source VSCS SH-O shutter thermal evaporator Silicon Sublimation Source SUSI Cryopump Valve Control Unit CVCU